Modeling and simulation of Capacitive Micromachined Ultrasonic Transducer (CMUT)
نویسندگان
چکیده
منابع مشابه
Modeling and simulation of Capacitive Micromachined Ultrasonic Transducer (CMUT)
This work presents the modeling and analysis of CMUT using the MEMS simulation software, Coventorware. A rectangular membrane CMUT of area 40μm X 20μm with 0.2μm thickness of silicon nitride as the movable membrane was designed. To reduce the parasitic capacitance, silicon substrate with gold was used as the fixed bottom electrode, and the combination of aluminium and chromium were used as top ...
متن کاملCapacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging
Capacitive micromachined ultrasonic transducers (CMUTs) bring the fabrication technology of standard integrated circuits into the field of ultrasound medical imaging. This unique property, combined with the inherent advantages of CMUTs in terms of increased bandwidth and suitability for new imaging modalities and high frequency applications, have indicated these devices as new generation arrays...
متن کاملTwo-Dimensional Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays for a Miniature Integrated Volumetric Ultrasonic Imaging System
We have designed, fabricated, and characterized two-dimensional 16x16-element capacitive micromachined ultrasonic transducer (CMUT) arrays. The CMUT array elements have a 250-μm pitch, and when tested in immersion, have a 5-MHz center frequency and 99% fractional bandwidth. The fabrication process is based on standard silicon micromachining techniques and therefore has the advantages of high yi...
متن کاملFinite Element Modeling of a Capacitive Micromachined Ultrasonic Transducer
Transducers based on piezoelectric crystals dominate the biomedical ultrasonic imaging field. However, fabrication difficulties for piezoelectric transducers limit their usage for complex imaging modalities such as 2D imaging, high frequency imaging, and forward looking intravascular imaging. Capacitive micromachined ultrasonic transducers (CMUTs) have been proposed to overcome these limitation...
متن کاملSimulation and Experimental Characterization of a 2-d, 3-mhz Capacitive Micromachined Ultrasonic Transducer (cmut) Array Element
AbstmclIn this paper, a 400-pm x 40C-prn, 2-D eapacitive micromachined ultrasonic transducer array element is experimentally characterized, and the results are found to be in agreement with theoretical predictions. As a receiver the transducer has a 1.8 x lo-' n m / m displacement sensitivity, and, as a transmitter, it produces 16.4 kPa/V of output pressure at the transducer surface at 3 MHz. T...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2006
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/34/1/098